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A theoretical analysis and development of a quartz strip mass-sensitive resonator AT-cut

Y. LAZAROV1,* , B. DULMET2, Z. RAICHEVA1, L. SPASSOV1, V. GEORGIEVA1, V. GADJANOVA1, M. ATANASSOV1, Ts. YORDANOV1

Affiliation

  1. “Georgi Nadjakov” Institute of Solid State Physics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee Blvd., 1784 Sofia, Bulgaria
  2. FEMTO-ST, CNRS, Université of Franche Comté, Ecole Nationale Supérieure de Mécanique et des Microtechniques, 26 Chemin de l'Epitaphe 25000 Besançon, France

Abstract

A theoretical analysis and development of an AT-cut quartz strip mass-sensitive resonator operating at 20 MHz fundamental thickness-shear mode is presented in this paper. The frequency spectra of acoustic waves propagating in a quartz strip plate is analyzed. Quartz plate dimensions ratio is determined on the basis of the theoretical analysis results. This assures a dominant contribution of the main thickness-shear mode in the complex wave, with a minimal modification as a result of the coupling with unwanted modes. A new miniature quartz mass-sensitive resonator is designed. An experimental series of resonators is produced and resonators motional parameters are measured. Samples of mass-sensitive resonators can be investigated as high sensitive sensors for registration of noxious gases in the atmosphere, like CO2, nitric oxides etc.

Keywords

Theoretical analysis, Quartz, Mass-sensitive resonator, Sensor.

Citation

Y. LAZAROV, B. DULMET, Z. RAICHEVA, L. SPASSOV, V. GEORGIEVA, V. GADJANOVA, M. ATANASSOV, Ts. YORDANOV, A theoretical analysis and development of a quartz strip mass-sensitive resonator AT-cut, Optoelectronics and Advanced Materials - Rapid Communications, 4, 11, November 2010, pp.1811-1814 (2010).

Submitted at: Aug. 2, 2010

Accepted at: Nov. 10, 2010