"

Cookies ussage consent

I agree.

Our site saves small pieces of text information (cookies) on your device in order to deliver better content and for statistical purposes. You can disable the usage of cookies by changing the settings of your browser. By browsing our site without changing the browser settings you grant us permission to store that information on your device.

Copper ion doped channel waveguide by two step ion exchange in silicate glass substrate

YINLEI HAO1,2,* , YUBIN LU3, LUFENG CHE2,3, JIANYI YANG1,2

Affiliation

  1. Jinhua Institute of Zhejiang University, Jinhua 310032, China
  2. Zhejiang Key Laboratory of Advanced Micro-Nano Transducers Technology, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
  3. Center of Microelectronics, Shaoxing Institute of Zhejiang University, Shaoxing 312035, China

Abstract

A process to manufacturing of copper-ion-doped channel optical waveguide in glass substrate is presented, which is composed of two stages: copper-ion-doped layer formation in glass substrate surface, and subsequent channel waveguide fabrication in the copper-ion-doped layer by Ag+/Na+ ion exchange. This approach circumvents high-temperature requirement in the stage of channel waveguide formation, and therefore make it viable to fabricate copper-ion-doped channel waveguide by melt salt ion exchange; furthermore, by employing Ag+ for the channel waveguide formation, the performance of copper-ion-doped optical waveguide is expected to be optimized with an extra degree of freedom.

Keywords

Copper-ion-doped, Glass, Channel waveguide.

Citation

YINLEI HAO, YUBIN LU, LUFENG CHE, JIANYI YANG, Copper ion doped channel waveguide by two step ion exchange in silicate glass substrate, Optoelectronics and Advanced Materials - Rapid Communications, 20, 7-8, July-August 2026, pp.338-343 (2026).

Submitted at: May 20, 2026

Accepted at: Aug. 3, 2026