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YEBO LU1,*
A technique for forming differently shaped Al micromaterials, based on electromigration through discharge holes has been developed. A passivated polycrystalline Al line with a discharge hole at the anode end provides the means to fabricate Al micromaterials fabrication with well determined shape profiles. The cross sectional profile corresponds to that of the discharge hole, and its area on the size of the hole needs to be confined to a suitable range because of temperature requirements and limitations from etching technique..
Micromaterials, Aluminium, Discharge hole.
YEBO LU, E lectromigration formed Al micro materials regulated by discharge hole shape, Optoelectronics and Advanced Materials - Rapid Communications, 7, 5-6, May-June 2013, pp.417-419 (2013).
Submitted at: Jan. 15, 2013
Accepted at: June 12, 2013
Optoelectronics and Advanced Materials - Rapid Communications
(2023): 0.5 - 2023 Journal Citation Reports (Clarivate Analytics, 2024)
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