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Effect of substrate temperature on structural and optical properties of sprayed indium oxide thin films

R. SATHYAPRIYA1, P. KATHIRVEL2,* , J. CHANDRASEKARAN3

Affiliation

  1. Department of Physics, SNS College of Technology, Coimbatore 641 035, Tamilnadu, India
  2. Department of Physics, United Institute of Technology ,Coimbatore-641 020, Tamilnadu, India
  3. Department of Physics, Sri Ramakrishna Mission Vidyalaya College of Arts and Science, Coimbatore-641 020, Tamilnadu, India

Abstract

Conducting and transparent indium oxide thin films are prepared by chemical spray deposition of aqueous solution of indium chloride. X–ray diffraction and optical transmission are used to characterize these films. X-ray diffraction study reveals that all the films are highly crystalline and oriented along <222> direction and the film crystallinity increases with increase in film thickness. Band gap energy of the films depends on thickness and varies from 3.53 eV to 3.5 eV. It is observed that resistivity of the films decreases with thickness, while mobility increases.

Keywords

Spray pyrolysis, Indium oxide, Optical properties.

Citation

R. SATHYAPRIYA, P. KATHIRVEL, J. CHANDRASEKARAN, Effect of substrate temperature on structural and optical properties of sprayed indium oxide thin films, Optoelectronics and Advanced Materials - Rapid Communications, 4, 6, June 2010, pp.849-851 (2010).

Submitted at: March 22, 2010

Accepted at: June 16, 2010