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Effect s of annealing atmosphere on the structur al and optical p roperties of ZnMgO thin films grown by RF magnetron sputtering

F. Z. HAO1, J . H. TAO1, Y . GUO1, C. MA1, F . SHI1,2,* , Z . HU1, J . CHU1,2,3

Affiliation

  1. Key Laboratory of Pola r Materials and Devices, Ministry of Education, Department of Electronic Engineering, East China Normal University, Shanghai 200241, China
  2. Shanghai Center for Photovoltaics, Shanghai 201201, China
  3. Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

Abstract

ZnMgO thin films were deposited on quartz substrates by radio frequency (RF) magnetron sputtering. For comparison, two series of identical films were then annealed in air and vacuum atmosphere at temperature in a ran ge of 340 500 ℃℃, respectively. The structural and optical properties of the ZnMgO films were systematically investigated by X ray diffraction (XRD), scanning electronic microscopy (SEM), spectrophotometer and photoluminescence (PL) spectra. Experimental results indicate that compared with vacuum annealing, air annealing can promote the formation of ZnMgO nanocrystals. At the same annealing temperature, the samples annealed in air have a more nanocrystalline number, larger size, better uniformity and higher PL peak intens ity than the vacuum annealed samples. However, the optical band gap of the film annealed in air is narrower than that of the sample annealed in vacuum. Furthermore, the samples annealed in air atmosphere at 420 have the largest number of nanocrystals and the largest size (19.14 nm). These results demonstrate that high quality ZnMgO nanocrystals can be precipitated by air annealing..

Keywords

ZnMgO thin films , Zn MgO nanocrystals Magnetron sputtering Annealing atmosphere.

Citation

F. Z. HAO, J . H. TAO, Y . GUO, C. MA, F . SHI, Z . HU, J . CHU, Effect s of annealing atmosphere on the structur al and optical p roperties of ZnMgO thin films grown by RF magnetron sputtering, Optoelectronics and Advanced Materials - Rapid Communications, 13, 3-4, March-April 2019, pp.249-254 (2019).

Submitted at: June 5, 2018

Accepted at: April 8, 2019