Abstract
VO2 films were prepared on silicate glass, mica and quartz substrates respectively with the sol-gel method and subsequent
spin coating technique. It was found that the substrates could significantly affect the film’s structure and property. The film on
quartz substrate had the highest purity and the best crystallinity, and that on glass substrate followed. For all prepared films,
the resistivity was temperature dependent, and the heating and cooling curves formed a hysteresis loop. The resistivity of
quartz film at the room temperature was about 7 times that of mica film, and about 14 times that of glass film. During the
heating process, the phase transition points of the films on silicate glass, mica and quartz substrates were 67℃, 68℃ and
64℃, and their resistivity mutations were about 2.1, 3.0 and 2.5 orders of the magnitude respectively..
Keywords
VO2 film, Substrates material, Sol-gel method, Electrical property.
Citation
YUEYAN LIU, JUNCHENG LIU, YUANBAO LI, LIN REN, SAI XU, Effects of substrate materials on the structure and electrical property of thermochromic VO2 film, Optoelectronics and Advanced Materials - Rapid Communications, 10, 11-12, November–December 2016, pp.921-924 (2016).
Submitted at: Nov. 17, 2015
Accepted at: Nov. 25, 2016