Abstract
The embedded grating splitter is proposed with the reflective design. Unlike the conventional grating, a metal layer is added
between the grating region and the substrate to reflect the incident wave in the novel grating. And a covering layer is
introduced to improve the efficiency and protect the grating surface during cleaning. Such a novel reflective beam splitter is
optimized to achieve high efficiency with good uniformity. Furthermore, the moderate fabrication tolerance for the grating duty
cycle is given for practical manufacture. The simulated results show that wide incident wavelength range and angular
bandwidth are exhibited by the embedded reflective grating splitter, especially for TM polarization..
Keywords
Embedded grating, Reflective efficiency, Splitter.
Citation
BO WANG, WENHAO SHU, LI CHEN, LIANG LEI, JINYUN ZHOU, Embedded grating splitter with reflective design, Optoelectronics and Advanced Materials - Rapid Communications, 9, 3-4, March-April 2015, pp.353-356 (2015).
Submitted at: June 22, 2014
Accepted at: March 19, 2015