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Embedded grating splitter with reflective design

BO WANG1,* , WENHAO SHU1, LI CHEN1, LIANG LEI1, JINYUN ZHOU1

Affiliation

  1. School of Physics and Optoelectronic Engineering, Guangdong University of Technology, Guangzhou 510006, China

Abstract

The embedded grating splitter is proposed with the reflective design. Unlike the conventional grating, a metal layer is added between the grating region and the substrate to reflect the incident wave in the novel grating. And a covering layer is introduced to improve the efficiency and protect the grating surface during cleaning. Such a novel reflective beam splitter is optimized to achieve high efficiency with good uniformity. Furthermore, the moderate fabrication tolerance for the grating duty cycle is given for practical manufacture. The simulated results show that wide incident wavelength range and angular bandwidth are exhibited by the embedded reflective grating splitter, especially for TM polarization..

Keywords

Embedded grating, Reflective efficiency, Splitter.

Citation

BO WANG, WENHAO SHU, LI CHEN, LIANG LEI, JINYUN ZHOU, Embedded grating splitter with reflective design, Optoelectronics and Advanced Materials - Rapid Communications, 9, 3-4, March-April 2015, pp.353-356 (2015).

Submitted at: June 22, 2014

Accepted at: March 19, 2015