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Evolution of the surface morphology with temperature, in oxidant atmosphere, of Ba (Ti1-xSnx)O3 (x = 0.13) thin films

M. CERNEA1,* , L. TRUPINA1, C. PLAPCIANU1, R. TRUSCA2, C. GALASSI3

Affiliation

  1. National Institute of Materials Physics, Str. Atomistilor 105 Bis, RO-77125, P.O. BOX: MG-7, Magurele-Bucharest, Romania
  2. METAV-R&D S. A., P.O. 22, Bucharest, Romania
  3. National Research Council-Research Institute of Science and Technology for Ceramics, Via Granarolo 64, I-48018 Faenza, Italy

Abstract

Thin films of Ba(Ti1-xSnx)O3 with x = 0.13 have been deposited by rf-magnetron sputtering and their growth morphology and structure vs. annealing temperature, in oxygen atmosphere, have been investigated. The films deposited on silicon-platinum substrates, at room temperature, in Ar atmosphere were amorphous. The as-obtained films had a mean surface roughness (RMS) around 6.529 nm and a grain size of about 150 nm. By annealing the film up to 1150 °C in oxygen, the grains size increases up to 1-1.5 μm in diameter. Films containing BaTi0.87Sn0.13 as crystalline phase with the cubic structure of BaTiO3 and, bundle-like morphology were obtained by heating the film at 1250 °C for 3h in oxygen. The as-obtained film showed the preferential (110) and (100) orientations.

Keywords

Barium titanate stannate, Thin films, Surface morphology, Oxygen atmosphere.

Citation

M. CERNEA, L. TRUPINA, C. PLAPCIANU, R. TRUSCA, C. GALASSI, Evolution of the surface morphology with temperature, in oxidant atmosphere, of Ba (Ti1-xSnx)O3 (x = 0.13) thin films, Optoelectronics and Advanced Materials - Rapid Communications, 3, 9, September 2009, pp.947-950 (2009).

Submitted at: Nov. 18, 2008

Accepted at: Sept. 15, 2009