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Exploration of the key parameters in sol gel preparation of Ta 2 O 5 films with high laser damage resistance

DI LIN1, CHENG XU1,* , MING MA1, WEITONG SHAN1, PEIZHONG FENG1, DAWEI LI2

Affiliation

  1. School of Materials Science and Engineering, China University of Mining and Technology, Xuzhou 221116, China
  2. Key Laboratory of High Power Laser Materials, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

Abstract

Ta2O5 films were prepared by using TaCl 5 as the precursor with differen t contents of H2O2 , HNO3 and acetylacetone (ACAC). The particle size, photoluminescence spectra and optical transmittance of the sols, as well as the surface morphology, weak absorption, laser induce damage threshold (LIDT) and damage morphology of the fil ms were studied. It was shown that the hydrolysis process in the sol was very slow when H2O2 was absent. With the H2O2 content increase, the nanoparticles grew faster in the sol. However, with the HNO3 content increase the hydrolysis process decreased and the sol became stable. The ACAC showed the inhibition effect similar to that of HNO3 on the sol evolution. With the ACAC content increase, the LIDT of the films decreased after the first rising , which showed an opposite trend compared with the weak absorp tion. Moreover, based on the experimental results, a pseudo ternary phase diagram of H2O2-HNO3-ACAC system was proposed that is helpful for the high LIDT Ta2O5 film preparation..

Keywords

Ta2O5, Hydrolysis, Absorption, Laser damage.

Citation

DI LIN, CHENG XU, MING MA, WEITONG SHAN, PEIZHONG FENG, DAWEI LI, Exploration of the key parameters in sol gel preparation of Ta 2 O 5 films with high laser damage resistance, Optoelectronics and Advanced Materials - Rapid Communications, 11, 5-6, May-June 2017, pp.357-363 (2017).

Submitted at: Jan. 7, 2017

Accepted at: June 7, 2017