Abstract
We demonstrate uniform and reproducible high-index-contrast distributed Bragg reflectors (HIC-DBRs) by introducing an
oxidized digital-alloy (DA) layer for low index materials. Fine-tunable DA-Al0.98Ga0.02As layers, which consists of multiple
stacks of 1 monolayer (ML)-thick GaAs and 49 ML-thick AlAs layers, are used for generating stable Al xOy layers instead of a
conventional, bulk AlAs layers. Highly uniform arrays of oxidized alumina are obtained through a wet -oxidation of DAAlGaAs
layers, which enable practical use of HIC-DBRs for vertical cavity surface emitting lasers (VCSELs) and other
resonant-cavity based optoelectronic devices. Detailed experiments together with optical calculations are also shown..
Keywords
Digital-alloy, High-index-contrast, Distributed Bragg reflector, AlGaAs, Oxidation, VCSEL.
Citation
GUNWU JU, SUBIN LEE, BYUNG HOON NA, HYUNG-JUN KIM, YOUNG MIN SONG, Highly reproducible high-index-contrast distributed Bragg reflectors with an oxidized digital-alloy AlGaAs, Optoelectronics and Advanced Materials - Rapid Communications, 12, 3-4, March-April 2018, pp.137-139 (2018).
Submitted at: Sept. 25, 2017
Accepted at: April 5, 2018