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Hydrogen depth profiling in DLC films using RNRA

I. BURDUCEA1,2,* , M. STRATICIUC1,2, P. M. RACOLTA1, C. C. SURDU-BOB3, M. BADULESCU3, A. ANGHEL3, AL. JIPA2, C. LUCULESCU3

Affiliation

  1. Horia Hulubei National Institute of Physics and Nuclear Engineering (IFIN-HH), 30 Reactorului St., Magurele, Ilfov, 077125, Romania
  2. Faculty of Physics, University of Bucharest, 405 Atomistilor St., Magurele, Ilfov, 077125, Romania
  3. National Institute for Lasers, Plasma and Radiation Physics (INFLPR), Atomistilor No.409, PO Box MG-36, Magurele-Bucharest, Romania

Abstract

A series of Diamond-Like Carbon (DLC) films were obtained using Thermionic Vacuum Arc (TVA) method at INFLPR and were assumed to be hydrogen free. Resonant Nuclear Reaction Analysis (RNRA) using 19F ions was used for hydrogen depth profiling in DLC films. We have found that a hydrogen content less than 5% is present within the DLC films deposited by TVA plasma, although no H-containing gas was used. This result can be explained by the dissociation of water molecules desorbed from the chamber walls during deposition. A larger percentage (around 20%) of H was found within the outermost surface of the films which is probably due to the water adsorbed from the ambient air..

Keywords

Diamond-Like Carbon, Thermionic Vacuum Arc, Resonant Nuclear Reaction Analysis, Hydrogen profiling.

Citation

I. BURDUCEA, M. STRATICIUC, P. M. RACOLTA, C. C. SURDU-BOB, M. BADULESCU, A. ANGHEL, AL. JIPA, C. LUCULESCU, Hydrogen depth profiling in DLC films using RNRA, Optoelectronics and Advanced Materials - Rapid Communications, 6, 9-10, September-October 2012, pp.832-835 (2012).

Submitted at: July 20, 2012

Accepted at: Sept. 20, 2012