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Image processing algorithms for characterization of MEMS type micro-tweezers aperture

TOPOR ALEXANDRU1, VOICU RODICA CRISTINA2, ULIERU DUMITRU3, RAVARIU CRISTIAN4,* , BABARADA FLORIN4

Affiliation

  1. SDETTI Doctoral School from Polytechnical University of Bucharest, Splaiul Independentei 313, Sect. 6, 060042, Bucharest Romania
  2. National Institute for Development and Research of Microtechnology, Str. Erou Iancu Nicolae 126A, 077190, Bucharest, Romania
  3. SC Sitex 45 SRL, Bulevardul Ghica Tei 114, Bucharest, Romania
  4. University "Politehnica" of Bucharest UPB, Faculty of Electronics ETTI, DCAE Department, Splaiul Independentei 313, Sect. 6, 060042, Bucharest, Romania

Abstract

The goal of this work is to develop an accompanying software solution based on image processing techniques to characterize the microgripper’s behavior as a function of voltage. To achieve this kind of work, a series of micro-tweezers with electro-thermal actuation are developed, which fulfill different functions: positioning, push-pull, gripping, able to be integrated in the robotic micromanipulation system. The actual micro-gripper is simulated as a MEMS micro-tweezers, considering also the manufacturing technology and the component materials. A specific contribution is to demonstrate the feasibility of applying image processing techniques to obtain accurate measurements of the aperture, starting from images with the gripper arms as regions of interest. In this way, the demonstrator can be used in medical applications, where cell manipulation needs enhanced precision.

Keywords

MEMS applications, Gripper arms, Filtering, SNR, Tracking.

Citation

TOPOR ALEXANDRU, VOICU RODICA CRISTINA, ULIERU DUMITRU, RAVARIU CRISTIAN, BABARADA FLORIN, Image processing algorithms for characterization of MEMS type micro-tweezers aperture, Optoelectronics and Advanced Materials - Rapid Communications, 16, 11-12, November-December 2022, pp.505-508 (2022).

Submitted at: Oct. 4, 2022

Accepted at: Dec. 5, 2022