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Z. RAICHEVA1,* , V. GEORGIEVA1, T. ANGELOV1, V. GADJANOVA1, L. VERGOV1, Y. LAZAROV1, M. ATANASSOV1
The influence of quartz plate roughening on the dynamic parameters of quartz resonators has been studied. For this aim AT – cut quartz plates with a diameter of 8 mm, having passed a standard technological cleaning, are subjected to treatment with abrasive powders of varying grain sizes - 3, 7, 14 and 20 μm. Piezoquartz resonators are fabricated on these plates with Au electrodes having a diameter of 4 mm. The characteristic parameters of the quartz resonators for the different surfaces at 25oC are as follows: Resonance frequency, Fs 15,7 MHz ± 100 kHz Dynamic resistance, Rs from 15 Ω for quartz plates, treated with SiC grains of 3μm to 120 Ω for quartz plates treated with SiC grains of 20μm Quality factor, Q from 28 000 for quartz plates treated with SiC grains of 3μm to 4 000 for plates treated with SiC grains of 20μm The changes in resonators dynamic parameters after mass loading with a sensitive magnetron sputtered WO3 layer, 200 nm thick are studied. Quartz Crystal Microbalance sorption properties are evaluated at NH3 concentration of 100 ppm. The results show that with increasing of quartz plates’ surface roughening the piezoelectric characteristics of the resonators change within admissible limits and the sensor sensitivity is improved..
QCM, Quartz resonator, Roughness, Tungsten oxide, Sorption.
Z. RAICHEVA, V. GEORGIEVA, T. ANGELOV, V. GADJANOVA, L. VERGOV, Y. LAZAROV, M. ATANASSOV, Improvement of sensor sensitivity of Quartz Crystal Microbalance by roughening of the piezoquartz platе, Optoelectronics and Advanced Materials - Rapid Communications, 6, 11-12, November-December 2012, pp.1160-1163 (2012).
Submitted at: Nov. 19, 2011
Accepted at: Oct. 30, 2012
Optoelectronics and Advanced Materials - Rapid Communications
(2023): 0.5 - 2023 Journal Citation Reports (Clarivate Analytics, 2024)
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