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Manufacturing 1×16 MMI vertical coupling optical splitter based on composite fabricating method

QING TAO1,2, LIANGPENG WEI1, SIHAO XIE1,2,*

Affiliation

  1. School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China
  2. Hubei Key Laboratory of Modern Manufacturing Quantity Engineering, School of Mechanical Engineering, Hubei University of Technology, Wuhan, Hubei, 430068, P.R. China

Abstract

In this paper, a composite fabricating method was proposed for manufacturing 1×16 MMI vertical coupling optical splitter with Su8 core layer and air cladding layer. The femtosecond laser composite fabrication combined simultaneous spatial and temporal focusing technology with traditional lens focusing method. Compared with the traditional lens focusing method, this composite fabricating method improved the processing accuracy. The diameter of incident aperture was 5 mm, the distance of grating pairs was 500 mm, and the angle of grating pairs was 48°, the groove density of gratings was 1500 lines/mm. The femtosecond laser wavelength was 800 nm, wavelength width was 8 nm, and, 100 fs pulses with a maximum pulse energy of 0.4 mJ at a repetition rate of 10 kHz. The testing results showed average insertion loss of each output port was 18.34 dB, and non-uniformity was 0.1988 dB in the optical splitter. This met requirements of vertical coupling optical interconnection for the EOPCB.

Keywords

Vertical coupling, Composite fabricating method, Simultaneous spatial and temporal focusing.

Citation

QING TAO, LIANGPENG WEI, SIHAO XIE, Manufacturing 1×16 MMI vertical coupling optical splitter based on composite fabricating method, Optoelectronics and Advanced Materials - Rapid Communications, 16, 9-10, September-October 2022, pp.397-406 (2022).

Submitted at: May 31, 2022

Accepted at: Oct. 5, 2022