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Modeling and analysis of vibration-based MEMS piezoelectric energy harvester for green energy source

SALEM SAADON1,2,* , OTHMAN SIDEK1

Affiliation

  1. Collaborative Microelectronic Design Excellence Center (CEDEC), Universiti Sains Malaysia(USM), Engineering Campus 14300 Nibong Tebal, Seberang Perai Selatan, Pulau Pinang, Malaysia
  2. School of Electrical and Electronic Engineering, Universiti Sains Malaysia (USM),14300 NibongTebal,Pulau Pinang, Malaysia

Abstract

The wireless sensor network market is growing quickly yet is limited by existing short lifetime batteries. Providing a green, virtually infinite alternative power source to traditional energy sources will significantly expand applications for Wireless Sensor Networks (WSNs) and other technologies, the use of piezoelectric materials to capitalize on the ambient vibrations surrounding a system is one method that has seen a dramatic rise in use for power harvesting. The simplicity associated with the piezoelectric micro-generators makes it very attractive for Micro-Electro-Mechanical Systems (MEMS) applications, in which mechanical vibrations are harvested and converted to electric energy. These micro-generators were designed as an alternative to a battery-based solution especially for remote systems. In this paper we proposed a design and simulation of MEMS-based energy harvested by using ANSYS and COVENTORWARE approaches. The improvements in experimental results obtained in the vibration based MEMS piezoelectric energy harvesters show very good scope for MEMS piezoelectric harvesters in the fields of power MEMS and Green Technology in the future..

Keywords

Vibration, Piezoelectricity, Cantilever beams, MEMS.

Citation

SALEM SAADON, OTHMAN SIDEK, Modeling and analysis of vibration-based MEMS piezoelectric energy harvester for green energy source, Optoelectronics and Advanced Materials - Rapid Communications, 6, 5-6, May-June 2012, pp.614-617 (2012).

Submitted at: April 22, 2012

Accepted at: June 6, 2012