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Morphology of zinc oxide thin films deposited by spray pyrolysis

ALİ OĞUZ ER1, ASHRAF HASSAN FARHA2, CEBRAIL GÜMÜŞ3, EMİNE GÜNERİc4, YÜKSEL UFUKTEPE3,*

Affiliation

  1. Department of Physics, Old Dominion University, Norfolk, VA 23529, USA
  2. Electrical and Computer Engineering, Old Dominion University, Norfolk VA 23529, USA
  3. Department of Physics, Cukurova University, Adana, 01330, Turkey
  4. Department of Primary Education, Erciyes University 33039 Kayseri, Turkey

Abstract

The effect of deposition temperature on the surface morphology and optical properties of zinc oxide (ZnO) thin films were studied. The ZnO films were deposited on microscopic glass substrates using the spray pyrolysis method for different substrate deposition temperatures. The deposited films were characterized by an X-ray diffractometer (XRD), a spectrophotometer, scanning electron microscopy (SEM), and atomic force microscopy (AFM). The transmittance spectra recorded through the spectrophotometer exhibits 85% transmittance. The XRD spectra showed polycrystalline nature of ZnO film. Surface parameters were calculated and compared for different thin films. It showed that the films were polycrystalline with hexagonal wurtzite structure and c-axis was perpendicular to the substrate. The grain size of the films changed from 240 to 440 nm with different substrate temperatures. The optical energy gap of thin films increases from 3.26 eV to 3.35 as the substrate temperature increasing from 660 K to 700 K. It was found that growth temperature has significantly affected the morphological (grain size, surface roughness) as well as optical properties of ZnO films, which are extremely important as they can improve or degrade the device performance..

Keywords

ZnO, Spray pyrolysis, Thin films, Surface morphology, Optical properties.

Citation

ALİ OĞUZ ER, ASHRAF HASSAN FARHA, CEBRAIL GÜMÜŞ, EMİNE GÜNERİc, YÜKSEL UFUKTEPE, Morphology of zinc oxide thin films deposited by spray pyrolysis, Optoelectronics and Advanced Materials - Rapid Communications, 5, 12, December 2011, pp.1286-1291 (2011).

Submitted at: Nov. 11, 2011

Accepted at: Nov. 24, 2011