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XIAO-LIU ZUO1, ZHI-JUN SUN1,*
In this work, we studied optical transmission and electrical conduction properties of micro-scale holy metal (Al) films fabricated on glass substrates using conventional UV lithography and wet etching processes. For the properly etched holy metal films, the measured transmittance in the visible spectrum range is uniformly above 85%, and the effective sheet resistance is in the order of ~1×10-5 Ω⋅cm; somehow they show better figure-of-merit than other typical transparent conducting layers. Additionally considering that the holes are in the micro-scale dimension, such structured metal films can be applied in many optoelectronic devices..
Transparent electrode, Metal film, Optical transmission, Conductivity.
XIAO-LIU ZUO, ZHI-JUN SUN, Optical transmissivity and conductivity of metal films with micro-scale holes for transparent electrodes, Optoelectronics and Advanced Materials - Rapid Communications, 4, 5, May 2010, pp.647-649 (2010).
Submitted at: April 10, 2010
Accepted at: May 20, 2010
Optoelectronics and Advanced Materials - Rapid Communications
(2023): 0.5 - 2023 Journal Citation Reports (Clarivate Analytics, 2024)
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