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V. SAVA1,* , C. ILIE2, M. POPA2, S. STANESCU3, M. I. RUSU4, M. UDREA5
The quality of laser machined surface and bulk of different materials with applications in micro-technologies is investigated. Machining occurred with a 248 nm KrF excimer laser and a particularly designed optical system. Optimising tests were performed on poly methyl methacrylate (PMMA), which were further applied to poly-ethylene terephthalate (PET), silicon and ferromagnetic material. All the tests were performed in normal atmospheric condition. The experimental results are presented and compared for improving the machining quality of materials..
Excimer laser, PMMA, MEMS manufacturing, Homogenizer optical systems.
V. SAVA, C. ILIE, M. POPA, S. STANESCU, M. I. RUSU, M. UDREA, Optimisation of processing with excimer laser mask technique, Optoelectronics and Advanced Materials - Rapid Communications, 5, 2, February 2011, pp.99-102 (2011).
Submitted at: Jan. 26, 2011
Accepted at: Feb. 17, 2011
Optoelectronics and Advanced Materials - Rapid Communications
(2023): 0.5 - 2023 Journal Citation Reports (Clarivate Analytics, 2024)
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