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Photoluminescence properties of ZnO:Al films deposited on flexible PET substrate by RF reactive magnetron sputtering

ZHIJIA ZHENG1, HUI LU1,* , HAN BI1, XIAN LIN2, AATTO LAAKSONEN3

Affiliation

  1. Department of Physics , East China University of Sci en ce and Technology , Shang hai 20023 7, China
  2. Department of Physics, Shanghai University, Shanghai 200444, China
  3. Division of Physical Chemistry, Department of Materials and Environmental Chemistry, Stockholm University, S-10691, Stockholm, Sweden

Abstract

Aluminium doped ZnO (AZO) thin films have been deposited on flexible polyethylene terephthalate (PET) substrate by RF reactive magnetron sputtering process at low substrate temperature (room 100 o C ), and their photoluminescence (PL) behavior at room temperature and the influence of O 2 :Ar ratio, substrate temperature, and deposition time were investigated. The strong near band edge UV emission and the weak blue emission were observed, while the defect related deep level green emission was nearly absent, indicating that high optical quality AZO films, grown on flexible PET substrate, were obtained using the RF reactive magnetron sputtering technique. The origin of the emissions is discussed..

Keywords

ZnO:Al (AZO), Thin films, Flexible PET , RF reactive magnetron sputtering, Photoluminescence.

Citation

ZHIJIA ZHENG, HUI LU, HAN BI, XIAN LIN, AATTO LAAKSONEN, Photoluminescence properties of ZnO:Al films deposited on flexible PET substrate by RF reactive magnetron sputtering, Optoelectronics and Advanced Materials - Rapid Communications, 7, 9-10, September-October 2013, pp.676-679 (2013).

Submitted at: Jan. 28, 2013

Accepted at: Sept. 18, 2013