Abstract
Transparent conductive pure indium oxide (In2O3) thin films have been deposited on glass substrates by an activated
reactive evaporation method and studied the effect of substrate temperature on the structural, electrical, optical and
photoluminescence properties of the deposited films. The films were crystallized in cubic structure having an average
optical transmittance of 80 % in visible region with low electrical resistivity of 9.7x10-4 Ωcm exhibiting an intensive
photoluminescence emission peaks at 415 nm and 440 nm.
Keywords
Indium oxide, Activated reactive evaporation, Transparent conducting oxide.
Citation
S. KALEEMULLA, A. SIVASANKAR REDDY, S. UTHANNA, P. SREEDHARA REDDY, Physical properties of pure In2O3 thin films, Optoelectronics and Advanced Materials - Rapid Communications, 2, 12, December 2008, pp.782-787 (2008).
Submitted at: Nov. 1, 2008
Accepted at: Dec. 4, 2008