"

Cookies ussage consent

I agree.

Our site saves small pieces of text information (cookies) on your device in order to deliver better content and for statistical purposes. You can disable the usage of cookies by changing the settings of your browser. By browsing our site without changing the browser settings you grant us permission to store that information on your device.

Preparation and surface morphology of black lithium tantalate wafers

XUEFENG XIAO1,2,3,* , QINGYAN XU1,2,3, HUAN ZHANG1,2, LINGLING MA1,2, LIAN HAI1,2, XUEFENG ZHANG3

Affiliation

  1. College of Electric and Information Engineering, North Minzu University, Yinchuan, 750021, China
  2. Key Laboratory of Physics and Photoelectric Information Functional Materials Sciences and Technology, North Minzu University, Yinchuan, 750021, China
  3. Ningxia Ju Jing Yuan Crystal Technology Company Limited, Shizuishan 753000, China

Abstract

Black lithium tantalate (BLT) wafers were prepared by annealing and reduction; a mixture of high purity aluminium powder and silicon powder were used as a reducing agent. The congruent lithium tantalate (CLT) wafers and the BLT wafers were prepared by reduction under different conditions and taken as the research objects. The surface of CLT wafers after annealing and reduction showed uniform orange-peel morphology by scanning electron microscope observation; the surface oxygen content was reduced and uniform. However, a local dark orange-peel spot formed in the wafers directly after the reduction process without annealing, and the oxygen content on the surface was reduced and uneven. Atomic force microscope observation revealed that the average surface roughness of the wafers was reduced and more uniform after annealing and reduction. The data showed that high-temperature annealing before reduction is helpful for the stress release of CLT wafers and a blackening effect is more easily achieved. The reduction treatment condition of CLT wafers determines the quality of BLT wafers. Good reduction and early treatment technology make it easy to prepare uniform and consistent blackening wafers, which can reduce the pyroelectric property of wafers and improve the yield in the subsequent process of making surface acoustic wave filter devices.

Keywords

Lithium tantalate, Reduction, Scanning electron microscope (SEM), Atomic force microscope (AFM).

Citation

XUEFENG XIAO, QINGYAN XU, HUAN ZHANG, LINGLING MA, LIAN HAI, XUEFENG ZHANG, Preparation and surface morphology of black lithium tantalate wafers, Optoelectronics and Advanced Materials - Rapid Communications, 16, 7-8, July-August 2022, pp.364-372 (2022).

Submitted at: Feb. 14, 2022

Accepted at: Aug. 10, 2022