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M. KUSKO1,*
This work presents the theoretical results regarding the optimization of an integrated Mach-Zehnder interferometer with a calibration waveguide refractometer based on silicon nitride rib waveguides with SU8 cladding. From modeling and simulation studies a sensor structure has been designed which presents toleration to fabrication errors and input coupling misalignments. The role of the chromium thin layer sections deposed over silicon nitride layer is analyzed in this work for alleviating the misalignment coupling errors and for improvement of the measurement accuracy, respectively..
Sensing, Simulations, Photonic integrated circuits.
M. KUSKO, Simulation and optimization of sensor based on Mach-Zehnder interferometer with reference waveguide, Optoelectronics and Advanced Materials - Rapid Communications, 7, 11-12, November-December 2013, pp.927-931 (2013).
Submitted at: Jan. 24, 2013
Accepted at: Nov. 7, 2013
Optoelectronics and Advanced Materials - Rapid Communications
(2023): 0.5 - 2023 Journal Citation Reports (Clarivate Analytics, 2024)
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