Abstract
The high Ga-content AlGaN thin films are grown on GaN/AlN/silicon (111) substrate by plasma assisted molecular beam epitaxy (PA-MBE). The full width at half-maximum (FWHM) of the AlxGa1-xN alloys deposited on silicon as determined by XRD symmetric RC ω/2θ scans of (0002) plane at room temperature is 0.520. The Al mole-fraction of this sample as deduced from Vegrad’s law and HR-XRD measurement is 0.29. Photoluminescence (PL) spectrums of sample have shown sharp and intense band edge emission of GaN without the existence of yellow emission band, showing good crystal quality
of the samples have been successfully grown on Si substrate.
Keywords
AlGaN/Si, AlGaN/GaN, III-Nitride.
Citation
M. Z. M. YUSOFF, Z. HASSAN, H. ABU HASSAN, Structural properties of high Ga-content AlxGa1-xN on Si substrate studied by high resolution X-ray diffraction and photoluminescence, Optoelectronics and Advanced Materials - Rapid Communications, 4, 5, May 2010, pp.644-646 (2010).
Submitted at: March 31, 2010
Accepted at: May 20, 2010