Structure and optical constants of electron beam deposited zinc nitride films
H. A. MOHAMED1,2,*
Affiliation
- Physics department, faculty of Science, Sohag University, 82524 Sohag, Egypt
- Physics department, Teachers College , King Saud University, 11148 Riyadh, KSA
Abstract
Zinc nitride (ZnN) films were prepared by electron beam evaporation technique. The effect of heat treatments on the
structural and optical properties of these films were studied. The as-deposited films show amorphous structure and some
peaks which are related to Zn3N2 and ZnO can be observed for annealed films. The study of the optical gap shows that
these films have direct optical ban gap about 3.2 eV at temperature 350 oC. At high temperature, the ZnN films become
more opaque and resistive. Other optical parameters such as refractive index, extinction coefficient and dispersion
parameters were investigated as a function of annealing temperature.
Keywords
Zinc nitride, Thin films, Electron beam, Optical properties.
Citation
H. A. MOHAMED, Structure and optical constants of electron beam deposited zinc nitride films, Optoelectronics and Advanced Materials - Rapid Communications, 3, 6, June 2009, pp.553-558 (2009).
Submitted at: May 17, 2009
Accepted at: June 15, 2009