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R. MÜLLER1,* , D. CRISTEA1, M. KUSKO1, P. OBREJA1, D. ESINENCO2, V. DAMIAN3, P. C. LOGOFATU3
The negative epoxy-based polymer photoresist SU8 was used in a lot of applications in the last years because it presents very good properties and is easy to be used in microsystem technology. This paper presents design, simulations and manufacturing of SU8–based optical waveguides photonic integrated circuits, and the possibility to integrate them on the same silicon platform with sensing elements and optoelectronic devices..
SU8 polymer, Integrated optics, Waveguide.
R. MÜLLER, D. CRISTEA, M. KUSKO, P. OBREJA, D. ESINENCO, V. DAMIAN, P. C. LOGOFATU, SU8 polymer materials used in integrated optic microsystems, Optoelectronics and Advanced Materials - Rapid Communications, 4, 2, February 2010, pp.228-233 (2010).
Submitted at: Sept. 3, 2009
Accepted at: Feb. 2, 2010
Optoelectronics and Advanced Materials - Rapid Communications
(2023): 0.5 - 2023 Journal Citation Reports (Clarivate Analytics, 2024)
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