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Trial to implement transmission infrared (IR) spectrometry for studying initial stages of copper deposition from bis(hexafluoroacetylacetonato) copper(II) (Cu(hfac)2) on Si(111)-7×7

C. IONESCU1,* , M. A. IONESCU1, T. O. NICOLESCU2, I. CIUCA1

Affiliation

  1. Faculty of Science and Materials Engineering, Politechnical University of Bucharest, Romania, UE
  2. Centre for Synthesis and Analysis in Organic Chemistry, UMF, Bucharest, Romania, UE

Abstract

IR experiments were performed in order to get spectra in the monolayer regime after CVD of Cu(hfac)2 on clean Si(111)-7x7. They originated from the need to understand the chemistry of Cu cluster termination via saturation with ligands the mechanism which we proposed after performing the UPS /XPS experiments (6) (7). The acquired spectra in the monolayer regime showed only noise. When a freshly prepared Si-H terminated surface (also 1 ML) was analyzed, the Si-H stretch which appears at 2084 cm-1 was not observed, and this confirmed that the experiment cannot be performed in transmission mode. These experiments were unsuccessful because of the limited sensitivity on this experimental geometry. Multiple internal reflection infrared spectrometry (MIR) should be used instead in order to get information regarding the orientation of the hfac ligand in the monolayer regime..

Keywords

IR spectroscopy, Cu deposition.

Citation

C. IONESCU, M. A. IONESCU, T. O. NICOLESCU, I. CIUCA, Trial to implement transmission infrared (IR) spectrometry for studying initial stages of copper deposition from bis(hexafluoroacetylacetonato) copper(II) (Cu(hfac)2) on Si(111)-7×7, Optoelectronics and Advanced Materials - Rapid Communications, 6, 1-2, January-February 2012, pp.17-21 (2012).

Submitted at: Dec. 8, 2011

Accepted at: Feb. 20, 2012