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Using Si3N4/LaAlO3 double layer antireflection coatings with improved efficiency for single crystal silicon solar cells

YU-CHIN CHOU1, YU-LI LIN2, CHIEN-HUNG WU2,* , CHENG-YI HSU1

Affiliation

  1. Ph. D Program in Engineering Science, Chung Hua University, Hsinchu, Taiwan, R.O.C
  2. Department of Optoelectronics and Materials Engineering, Chung Hua University, Hsinchu, Taiwan, R.O.C

Abstract

In this paper, we present highly efficient p-type crystalline silicon solar cells coated with a novel antireflection thin film composed of lanthanum aluminate oxide (LaAlO3). We compared the results of single layer antireflection coatings (SLARCs) and double layer antireflection coatings (DL-ARCs). The antireflection thin films were deposited onto solar cells by using plasma-enhanced chemical vapor deposition (PECVD) of silicon nitride (Si3N4) and e-beam evaporation of LaAlO3. The deposition method changed the morphology of the LaAlO3 thin film, which contributed to a change of the refractive index. Si3N4/LaAlO3 DL-ARCs samples showed higher output performance efficiency than those of Si3N4 SL-ARCs samples. Adding a LaAlO3 thin film through this deposition process, increased efficiency by up to 19.56% at AM 1.5G on crystalline silicon solar cells, and demonstrated a 1.46% efficiency gain compared with baseline solar cells with Si3N4 SLARCs.

Keywords

Lanthanum aluminate oxide (LaAlO3), Double layer antireflection coatings (DL-ARCs), Solar cells.

Citation

YU-CHIN CHOU, YU-LI LIN, CHIEN-HUNG WU, CHENG-YI HSU, Using Si3N4/LaAlO3 double layer antireflection coatings with improved efficiency for single crystal silicon solar cells, Optoelectronics and Advanced Materials - Rapid Communications, 17, 7-8, July-August 2023, pp.311-316 (2023).

Submitted at: Oct. 31, 2022

Accepted at: Aug. 7, 2023