Abstract
In this paper, we present highly efficient p-type crystalline silicon solar cells coated with a novel antireflection thin film
composed of lanthanum aluminate oxide (LaAlO3). We compared the results of single layer antireflection coatings (SLARCs) and double layer antireflection coatings (DL-ARCs). The antireflection thin films were deposited onto solar cells by
using plasma-enhanced chemical vapor deposition (PECVD) of silicon nitride (Si3N4) and e-beam evaporation of LaAlO3.
The deposition method changed the morphology of the LaAlO3 thin film, which contributed to a change of the refractive
index. Si3N4/LaAlO3 DL-ARCs samples showed higher output performance efficiency than those of Si3N4 SL-ARCs
samples. Adding a LaAlO3 thin film through this deposition process, increased efficiency by up to 19.56% at AM 1.5G on
crystalline silicon solar cells, and demonstrated a 1.46% efficiency gain compared with baseline solar cells with Si3N4 SLARCs.
Keywords
Lanthanum aluminate oxide (LaAlO3), Double layer antireflection coatings (DL-ARCs), Solar cells.
Citation
YU-CHIN CHOU, YU-LI LIN, CHIEN-HUNG WU, CHENG-YI HSU, Using Si3N4/LaAlO3 double layer antireflection coatings with improved efficiency for single crystal silicon solar cells, Optoelectronics and Advanced Materials - Rapid Communications, 17, 7-8, July-August 2023, pp.311-316 (2023).
Submitted at: Oct. 31, 2022
Accepted at: Aug. 7, 2023