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Vibration-based MEMS piezoelectric energy harvesters using cantilever beams

SALEM BIN SAADON1,2, OTHMAN BIN SIDEK1, OSAMA S. HAMAD2,*

Affiliation

  1. Collaborative Microelectronic Design Excellence Center (CEDEC)
  2. School of Electrical and Electronic Engineering Universiti Sains Malaysia, Engineering Campus 14300 Nibong Tebal, Seberang Perai Selatan, Pulau Pinang, Malaysia

Abstract

The simplicity associated with the piezoelectric micro-generators makes it very attractive for MEMS applications, especially for remote systems. The use of piezoelectric materials to capitalize on the ambient vibrations surrounding a system is one method that has seen a dramatic rise in use for power harvesting. In this paper we reviewed the work carried out by researchers during the last three years. The improvements in experimental results obtained in the vibration based MEMS piezoelectric energy harvesters show very good scope for MEMS piezoelectric harvesters in the field of power MEMS in the near future.

Keywords

PZT, Vibration, Cantilever beam, Energy harvesting, MEMS.

Citation

SALEM BIN SAADON, OTHMAN BIN SIDEK, OSAMA S. HAMAD, Vibration-based MEMS piezoelectric energy harvesters using cantilever beams, Optoelectronics and Advanced Materials - Rapid Communications, 4, 8, August 2010, pp.1219-1224 (2010).

Submitted at: July 15, 2010

Accepted at: Aug. 12, 2010